K-WANG

+086-15305925923
Service expert in industrial control field!
NameDescriptionContent
Adequate Inventory, Timely Service
pursuit of excellence 
Ship control system
Equipment control system
Power monitoring system
Current position:
新闻动态
newS
   
Brand

WAGO I/O System 750/753 Series Distributed Automation System

From: | Author:Wang | Time :2025-11-14 | 361 visit: | 🔊 Click to read aloud ❚❚ | Share:

WAGO I/O System 750/753 Series Distributed Automation System

Core positioning and purpose of the system

Core function: Receive digital/analog signals from sensors, control actuators, communicate with higher-level controllers through fieldbus interfaces, and support signal preprocessing.

Applicable scenarios: Indoor dry environments in the field of industrial automation, suitable for ordinary industrial areas, and certified for special scenarios such as marine, nearshore, explosion-proof (Ex i), functional safety, etc.

Installation requirements: As an open device, it needs to be installed in an additional enclosure and operated by professional electrical personnel according to standards such as EN 50110-1/-2 and IEC 60364.


System hardware structure and characteristics

1. Classification and functions of core components

Specific classification of component types and key characteristics

Head Stations' fieldbus couplers, controllers, and PFCs provide fieldbus interfaces (such as PROFINET and ETHERNET) to manage I/O module communication and power supply, with reset keys, status indicator lights, and service interfaces

I/O module analog input/output module supports voltage and current signal acquisition and output, distinguished by color coding (green=analog input, blue=analog output)

The digital input/output module is adapted to switch signals, with color codes of yellow (input) and red (output)

Functional/technical modules include relay module, communication module, filtering module, and transparent shell identification

The power/segment module provides system/on-site power supply, supports potential partitioning, and can interrupt or switch power supply links

The auxiliary component end module is used for node end sealing to ensure mechanical stability

Distance module (750-616) is used to increase creepage distance in explosion-proof scenarios, with a width of 12mm

2. Module physics and connection characteristics

Appearance and coding:

Types of shell color differentiation: light gray (standard module), blue (Ex i explosion-proof), signal yellow (functional safety), dark gray (750 XTR).

Marking information: including product model, wire cross-section, production data, DataMatrix code, CE/UL/Ex certification identification, etc. The head station serial number is marked on the service interface cover plate.

Connection technology:

CAGE CLAMP ®: It needs to be opened with operating tools and supports solid, multi strand, and thin multi strand conductors (0.08-4mm ²).

Push-in CAGE CLAMP ®: Tool free direct insertion (multi strand/thin multi strand conductors with cold pressed ends, solid conductors), other conductors require tool assistance.

Mechanical parameters:

Module width: 12mm, 24mm, 48mm, maximum node length (from head station to end module) ≤ 768mm.

Installation adaptation: 35mm DIN rail, fixed by locking cam, supports horizontal (left/right/up/down) and vertical (up/down) installation posture.

3. Electrical structure and power supply

Potential level:

System level: including system power supply (24VDC), local bus signals, and electrical isolation from other levels.

On site level: including on-site power supply (24VDC/230VAC, etc.), I/O signals, and can be divided into multiple potential zones.

Fieldbus level: independent of the first two, voltage/current depends on the fieldbus standard.

Power supply requirements:

System power supply: SELV/PELV power supply is required, and the total current of a single node should not exceed the rated value of the module. It is recommended to use the same voltage source for power supply.

On site power supply: configured according to the load, supporting different voltages in multiple areas (such as 24VDC, 230VAC), and requiring overcurrent protection (integrated fuse power module or external fuse).

Buffer requirements: When meeting the IEC 61131-2 standard, an external buffer module (such as UPS, capacitor buffer) is required.

System Planning and Installation Specification

1. Core requirements for node planning

Node composition: It should include at least one head station, one power module, one I/O module, and one end module, and support up to 250 addressable I/O modules.

Security planning:

In hazardous voltage scenarios, DIN rails must be grounded (PE) to ensure electrical connection with the enclosure/frame.

Control lines, signal lines, and power lines need to be spatially separated to avoid electromagnetic interference.

Data security: control the isolation of the network from the Internet/office network, close useless ports, change passwords regularly, and adopt the "defense in depth" mechanism.

Installation gap:

Both sides of the node should be ≥ 20mm, and the top and bottom should be ≥ 35mm (if the top is a heating component, it should be ≥ 65mm), to avoid blocking heat dissipation.

2. Installation and disassembly steps

Installation process:

Head station installation: The buckle is fixed on the DIN rail, and the locking cam is rotated with a tool to engage.

I/O module installation: Assemble from left to right in sequence, press until the buckle is locked. The 753 series requires fixing the module before connecting the wiring interface.

Encoding configuration: The 753 series module prevents accidental insertion by encoding the key (753-150), with 2 keys supporting 16 encoding combinations.

Dismantling process:

Power outage confirmation: Disconnect the system from the on-site power supply and verify that there is no voltage before operation.

Head station disassembly: Unlock the locking cam with the tool, pull the release buckle to detach from the guide rail.

I/O module disassembly: 750 series, directly pull the orange release buckle; The 753 series first separates the wiring interface (pull the locking latch), and then pull the release buckle.

3. Wiring operation specifications

Conductor requirements:

Supports copper and aluminum conductors (aluminum conductors need to be cleaned and coated with "Alu Plus" contact paste), with only one conductor connected to a single clamping unit.

The cross-sectional area of the wire needs to match the current load, and larger cross-sectional conductors should be selected in high current scenarios to reduce temperature rise.

Wiring steps:

CAGE CLAMP ®: Insert the tool into the rectangular opening to open the fixture → Insert the conductor → Pull out the tool lock.

Push-in CAGE CLAMP ®: Direct insertion adapter conductor; Non compatible conductors require tools to be tilted and inserted into the opening after opening the fixture.


Special scenario application configuration

1. Marine and nearshore scenarios (DNV certified)

Classification requirements:

Class A: Suitable for non bridge and non outdoor deck areas; Class B: Suitable for the entire area (including the bridge and outdoor deck).

Power supply configuration:

A high isolation (HI) filtering module is required for 24VDC power supply: the 750-626 series is used for system power supply, and the 750-624 series is used for on-site power supply.

Isolation monitoring scenarios require the use of HI version filtering modules (such as 750-624/020-000, 750-626/020-000).

Exception: Non 24VDC on-site power supply does not require additional filtering modules.

2. Explosion proof (Ex i) scenarios

Power supply requirements:

Only use Ex i dedicated bus power supply module (750-606 with diagnosis, 750-625/000-001 without diagnosis).

Distance requirement:

The Ex i power supply module needs to be connected in series in front of the Ex i module area, and four distance modules (750-616) need to be connected behind the area; If the subsequent module is the bus extension end module (750-627), only one distance module is required; If it is a regular end module (750-600), no distance module is required.

Operation restrictions: It is prohibited to plug or unplug components, connect wires, operate switches, or replace fuses in explosive environments.

3. Functional safety scenarios

Power supply protection:

The system and on-site power supply (24VDC) require the configuration of filtering modules (750-626 series for the system and 750-624 series for the site) to meet the surge protection requirements of EN 61326-3-1.

Module requirements: Use I/O modules with Functional Safety Identification (FS) and configure redundancy or isolation measures according to safety levels.

4. UL certification scenario requirements

Ordinary area:

The 24VDC system requires an external slow melting fuse (maximum 2A, minimum 30VDC) for power supply.

24VDC on-site power supply requires external slow melting fuses (maximum 10A, minimum 30VDC); ≤ 250VAC/DC on-site power supply fuse, maximum 10A.

Dangerous Area (Class I, Division 2):

It needs to be installed in the shell unlocked by the tool, and can only be operated after power off or confirming that there is no risk of explosion in the area.

Specific modules (such as 750-439, 750-538) are only allowed to be used in conjunction with Ex i power supply modules (750-606/750-625).

Safety and compliance requirements

1. General safety regulations

Personnel qualifications: Installation, operation, and maintenance must be carried out by professional electrical personnel who comply with EN 50110-1/-2 and IEC 60364 standards.

Electrical safety:

Disconnect all power supplies before operation and verify that there is no voltage; SELV/PELV circuits need to be safely isolated from hazardous voltage circuits.

To avoid electrostatic discharge (ESD), take protective measures according to DIN EN 61340-5-1/-3 (such as anti-static wristbands).

Mechanical and thermal safety:

Do not open the product casing and avoid touching live contacts; The shell may generate heat and needs to be cooled before touching in high temperature environments.

Do not use cleaning agents that contain penetrant/insulating properties (such as silicone, glycerin). Isopropanol can be used for cleaning.

2. Certification and Compliance

International certifications: including CSA, KEMA/KEUR, ABS (Classification Society), UL, ATEX, EAC, CCC, RCM and other certifications.

Following standards: EN 60947, UL 1059, IEC 61010-1, WEEE (Waste Disposal), etc.

Intellectual Property: The content of the document is protected by copyright and may not be copied or distributed without written permission from WAGO; Third party trademarks and patents belong to the corresponding party.

3. Disposal and Recycling

Disposal requirements: Classify and recycle electrical and electronic waste according to local regulations, and do not mix it with household waste.

Preprocessing: Remove memory cards and batteries (such as lithium batteries and lead-acid batteries), clear stored data, and operate with protective equipment.

Packaging recycling: B2B transportation packaging can be recycled for free through the Interseroh system.


Supporting tools and accessories

1. Configuration and debugging tools

COCKPIT: integrates hardware configuration, programming, simulation, visualization, and debugging functions, supporting fully automated processes.

WAGO Smart Designer: 3D configuration tool that can design node structures and calculate power requirements.

WAGO-I/O-CHECK: Used for testing 750/753/XTR series nodes, supporting input/output control and status monitoring.

2. Essential Attachment List

Attachment Type Model Example Function

DIN rail 210-1xx series steel/copper material, 35mm specification, galvanized/chrome plated treatment

Operating tool 210-722 insulated handle, compatible with CAGE CLAMP ®  wiring

Test probes 735-500, 859-500 1mm diameter, supporting 30VAC/60VDC, CAT0 level

Code key 753-150 753 series module anti misplacement, providing 16 different codes

Marking part 2009-145 Mini WSB Inline marking, roll up 1500 pieces, stretchable 5-5.2mm

End block 249-1xx series screw free end block, compatible with 35mm DIN rail

Shielding connection system 790 series enhances cable shielding grounding effect and reduces electromagnetic interference

Buffer module 787 series capacitor buffer ensures power supply stability


  • ABB PFSA240 Roll DC Supply Unit 3BSE073476R1 Industrial Stressometer Power Supply Module for Rolling Mill Systems
  • ABB PFSA107-Z42 DTU Stressometer Digital Transmission Unit High Precision Strip Tension Measurement Module
  • GE AT868-2-1-1 Ultrasonic Flow Transmitter AquaTrans AT868 Dual Channel Industrial Flow Meter
  • ABB SCC-C 23070-0-10232110 Industrial Control Module Automation System Communication Controller
  • APPLIED MATERIALS 0041-96185 - Heater Assy with 0150-45776 0190-60492 AMAT
  • APPLIED MATERIALS 0021-33426 - SHIELD INNER SINGLE 300MM NO COIL AMAT
  • APPLIED MATERIALS 0140-01905 - HARNESS ASSY DUAL IHC PRESS CONT ADAPTER 16798 AMAT
  • APPLIED MATERIALS 0051-01848 - LINE VAC EXHAUST CH Y LEAK CHECK PORT EPI AMAT
  • APPLIED MATERIALS 0010-02863 - P5000 150mm Teos Susceptor AMAT
  • APPLIED MATERIALS 0010-14056 - ASSY INJECT NOZZLE STANDARD AMAT
  • APPLIED MATERIALS 0020-34694 - LINER GDP R2 OXIDEGECO AMAT
  • APPLIED MATERIALS 0195-07416 - SYCAMORE-X CMP POLISHER I/O ASSEMBLY AMAT
  • APPLIED MATERIALS 0200-09036 - WAFER LIFT PIN AMAT
  • APPLIED MATERIALS 0021-39090 - FLANGE 10" CONFLAT ADAPTOR AMAT
  • APPLIED MATERIALS 0100-99011 - GAS INTERLOCK AMAT
  • APPLIED MATERIALS 0100-11002 - digital I/O card AMAT
  • APPLIED MATERIALS 0190-40000 - PNEUMATIC MANIFOLD CHAMBER 32903 AMAT
  • APPLIED MATERIALS 0021-39792 - PERF PLATE OX. 200 MM TEOS 21896 AMAT
  • APPLIED MATERIALS 0040-04896 - BELL JAR QUARTZ Q-KOTE 200MM AMAT
  • APPLIED MATERIALS 0020-20653 - BASE HEATER AMAT
  • APPLIED MATERIALS 0190-75057 - Lift Cylinder Assy AMAT
  • APPLIED MATERIALS 0010-70345 - Applied Materials 0042-01927
  • APPLIED MATERIALS 0100-91024 - PWBA PRE-ACCEL VENDOR I/F PCB 9500 IMPLANT AMAT
  • APPLIED MATERIALS 0041-56144 - HEATER PEDESTAL ASSEMBLY ENP FCVD EDGE AMAT
  • APPLIED MATERIALS 0090-00836 - SOURCE MOTOR ASSY 0040-24074 GFB5G10 FBLM5120W AMAT
  • MKS 0190-63631 - MASS FLOW VERIFIER MFVA-33168 AMAT
  • APPLIED MATERIALS 0100-35070 - ASSY PCB RF GENERATOR INTERFACE AMAT
  • APPLIED MATERIALS 0010-32221 - ASSEMBLY ROUGH THROTTLE VALVE DRIVE 300MM AMAT
  • SANYO DENKI 0190-14713 - P30B06040HXS8RM AC SERVO MOTOR BL SUPER AMAT
  • APPLIED MATERIALS 0190-14224 - FLEX DIST PANEL AMAT
  • APPLIED MATERIALS 0190-23897 - SPECIFICATION EXMP SYNCNET STAND ALON 14535 AMAT
  • APPLIED MATERIALS 0010-04542 - HEATER ASSY 200MM FC WXZPLUS OSCR 15607 AMAT
  • APPLIED MATERIALS 0190-51414 - AC SERVO DRIVER SGDV-OCA05AY890AA AMAT
  • APPLIED MATERIALS 0020-31747 - P5000 LOADLOCK LID WAFER TXR CHMBR 0020-32930 12573 AMAT
  • APPLIED MATERIALS 0620-01727 - CABLE ASSY SIGNAL RBN 50PIN DSUB EMI RES 17781 AMAT
  • APPLIED MATERIALS 0190-A9510 - IP POWER SUPPLY 33361 AMAT
  • APPLIED MATERIALS T1101-05-000-30 - CRYO TIGER COMPRESSOR AMAT
  • APPLIED MATERIALS 0040-13338 - LINK 1 UPPER 7.2 DEGREE OFFSET CR 300MM 38177 AMAT
  • APPLIED MATERIALS 0190-06926 - Cable SQS R/A TO SQS R/A #2 AMAT
  • APPLIED MATERIALS 0200-00705 - EDGE RING THIN 200MM AMAT
  • APPLIED MATERIALS 0190-01399 - INLINE O3 SNSR ULTRA FULL FLOW HI-CON 6627 AMAT
  • APPLIED MATERIALS 0190-21054 - RF MATCH CABLE ASSEMBLY PRECLEAN 2 AMAT
  • APPLIED MATERIALS 0041-12156 - REFLECTOR PLATE INJECT 300MM RADIANCE PLUS 29763 AMAT
  • MKS 0100-03680 - PCB CHMBR DIST 0090-09483 AS00363-16 35465 AMAT
  • APPLIED MATERIALS E11355460 - Plasma Detector E11355470 Rev.B AMAT
  • APPLIED MATERIALS 0021-33981 - LOWER SHIELD AMAT
  • APPLIED MATERIALS 0100-00583 - GAS PANEL CONTROLLER DIST AMAT
  • APPLIED MATERIALS 0010-54820 - IPC VALVE ASSEMBLY FM 1/2" INTER-PLATEN SPRAY AMAT
  • APPLIED MATERIALS 0020-31747 - P5000 LOADLOCK LID WAFER TXR CHMBR 0020-32930 12573 AMAT
  • APPLIED MATERIALS 0020-40566 - BLANK-OFF POSITION E-F ENP AMAT
  • APPLIED MATERIALS 0021-31023 - Flange Spacer Automatch Single RPS Producer SE AMAT
  • APPLIED MATERIALS 0020-21225 - WEIGHT RING 300MM TITAN PROFILER AMAT
  • APPLIED MATERIALS 0190-A9510 - IP POWER SUPPLY 33361 AMAT
  • APPLIED MATERIALS 0100-90618 - PCB H1 GROUND PDU MOTHER BOARD 0100-90036 AMAT
  • APPLIED MATERIALS 0010-04542 - HEATER ASSY 200MM FC WXZPLUS OSCR 15607 AMAT
  • APPLIED MATERIALS 0020-31658 - CLAMP VESPEL OX-MLR-NIT 200MM AMAT
  • APPLIED MATERIALS 0021-09974 - WINDOW SAPPHIRE PUMPING PLATE AMAT
  • APPLIED MATERIALS 0051-01849 - LINE VAC EXHAUST ELBOW CH Y FAC TRAY EPI 30 AMAT
  • APPLIED MATERIALS 0010-29842 - 300mm DBR High Temp Belt Wrist Titanium AMAT
  • APPLIED MATERIALS 1410-01166 - Heating Jacket AMAT
  • APPLIED MATERIALS 0620-01727 - CABLE ASSY SIGNAL RBN 50PIN DSUB EMI RES 17781 AMAT
  • APPLIED MATERIALS 0010-70345 - Applied Materials 0042-01927
  • APPLIED MATERIALS 0090-00836 - SOURCE MOTOR ASSY 0040-24074 GFB5G10 FBLM5120W AMAT
  • APPLIED MATERIALS 0190-46837 - INFRARED THERMOMETER COMM BOX RAYMI3COMM 30009 AMAT
  • APPLIED MATERIALS 0020-31886 - FLANGE INSULATION UNIBODY .400 THK AMAT
  • APPLIED MATERIALS 0010-05920 - CONTROLLER CCM PROD ETCH CS-PM CARD CAGE AMAT
  • APPLIED MATERIALS 0242-30292 - KIT 20 SCCM MFC W/HRDWR UNIBODY 6449 AMAT
  • APPLIED MATERIALS 0040-41061 - JIG FOUR PT LEVELING TOOL TXZ 300MM AMAT
  • APPLIED MATERIALS 0020-30287 - ADAPTER RING PUMPING PLATE 200MM COMMO AMAT
  • APPLIED MATERIALS 0041-12156 - REFLECTOR PLATE INJECT 300MM RADIANCE PLUS 29763 AMAT
  • APPLIED MATERIALS 0010-37866W - ASSY INT ISRM MODULE FULL SCAN SMG AMAT
  • APPLIED MATERIALS 0090-08137 - 300MM TXZ DLI HEATER CONTROLLER MODULE AMAT
  • APPLIED MATERIALS 0040-20006 - ARM WELDMENT SOURCE STD 8464 AMAT
  • APPLIED MATERIALS 0090-07392 - Dual RF filter AMAT
  • APPLIED MATERIALS 0190-06926 - Cable SQS R/A TO SQS R/A #2 AMAT
  • APPLIED MATERIALS 0020-70279 - LIFTER 150MM WAFER ORIENTER P5000 AMAT
  • APPLIED MATERIALS 0190-35652 - SERIPLEX MUX I/O PCB AMAT
  • APPLIED MATERIALS 0100-11002 - digital I/O card AMAT
  • APPLIED MATERIALS E11355460 - Plasma Detector E11355470 Rev.B AMAT
  • APPLIED MATERIALS 0010-19188 - ASSY COOLDOWN LIFT 34703 AMAT
  • APPLIED MATERIALS 0100-00975 - PCB STEPPER CONTROLLER 2 8099 AMAT
  • APPLIED MATERIALS 0190-16236 - MOTOR ENCODER ASSY ROBOT WRIST MIRRA CMP AMAT
  • APPLIED MATERIALS 0040-48671 - LEFT GUIDE 300MM L-DOOR 37961 AMAT
  • MKS 0100-03680 - PCB CHMBR DIST 0090-09483 AS00363-16 35465 AMAT
  • APPLIED MATERIALS 0190-01399 - INLINE O3 SNSR ULTRA FULL FLOW HI-CON 6627 AMAT
  • APPLIED MATERIALS 8330 - Pair Of Side viewport Panels AMAT
  • APPLIED MATERIALS 0190-75057 - Lift Cylinder Assy AMAT
  • APPLIED MATERIALS 0100-02016 - PCB ASSY ANALOG SYNC DETECT 904-125N AMAT
  • Abaco Systems 0090-08517 - VMICPCI-7326 PCB 38085 AMAT
  • APPLIED MATERIALS 0100-20069 - ASSY WAFER ORIENTER BOARD 0100-02797 AMAT
  • ELEKTRO-AUTOMATIK EA-PS 9036-070 - S01 POWER SUPPLY 625-795365 AMAT
  • APPLIED MATERIALS 3310-00139 - CAPACITANCE PIRANI GAUGE C-SEAL MOUNT 15-PIN AMAT
  • APPLIED MATERIALS 0010-00510 - ASSY BEARING STD 36806 AMAT
  • APPLIED MATERIALS 0041-13895 - FACEPLATE 26MIL CENTERHOLE RF CAP 300MM SACVD 13964 AMAT
  • APPLIED MATERIALS T1101-05-000-30 - CRYO TIGER COMPRESSOR AMAT
  • APPLIED MATERIALS 0050-10076 - WELDMENT DUAL HE MANF SACVD 20243 AMAT
  • MKS 0190-48179 - AS01294-05237-030 Hardened DeviceNet I/O Block AMAT
  • APPLIED MATERIALS 0240-75102 - 8" Transfer Blade 200mm End Effector AMAT
  • APPLIED MATERIALS 0110-90770 - Index Control PCB AMAT
  • APPLIED MATERIALS 0090-91209 - SOURCE SUPPRESSION CLAMPING BOX AMAT
  • APPLIED MATERIALS 0200-01427 - ISOLATOR CERAMIC CVD LOW K 300MM PROD AMAT
  • APPLIED MATERIALS 0021-03637 - FACEPLATE SILANE PRODUCER 200MM AMAT
  • APPLIED MATERIALS 0010-09837 - Wafer Lift Tungsten Precision 5000 AMAT
  • APPLIED MATERIALS 0101-57014 - PCB DEFLECTION-AMPLIFIER BOARD D-AMP 50-06 26296 AMAT
  • APPLIED MATERIALS 0190-36715 - PCB GP IO DISTRIBUTION AMAT
  • APPLIED MATERIALS 0660-00078 - PCB ASSY DNET ANALOG I/O CDN396 DIP-506-068 13392 AMAT
  • APPLIED MATERIALS 0190-B4670 - FIBER HARNESS DVD2-SBBI AMAT
  • APPLIED MATERIALS 1080-02356 - ACCELNET SINGLE AXIS SERVO DRIVE 800-2122 AMAT
  • APPLIED MATERIALS 0040-02937 - WATER MANIFOLD TXZ CIP 200 & 300MM AMAT
  • APPLIED MATERIALS 0040-08944 - LID ANNEAL ECP 200MM AMAT
  • SMC INOI-7134-111 - 4-PORT DEVICENET UPA MODULE Pressure Control AMAT
  • SMC INOI-7134-21 - 4-PORT DEVICENET UPA MODULE Pressure Control AMAT
  • APPLIED MATERIALS 0100-40024 - ASSY WPCBA LOADLOCK INTERCONNECT BOARD AMAT
  • APPLIED MATERIALS 0660-01635 - Chamber P2 Board A AMAT
  • APPLIED MATERIALS 0041-31945 - DOOR ENP ALUM SPD SLIT VALVE VITON LLK 3 AMAT
  • APPLIED MATERIALS 0040-48671 - LEFT GUIDE 300MM L-DOOR 37961 AMAT
  • APPLIED MATERIALS 0051-01849 - LINE VAC EXHAUST ELBOW CH Y FAC TRAY EPI 30 AMAT
  • APPLIED MATERIALS 0040-81661 - CATHODE FACILITY PLATE 35320 AMAT
  • APPLIED MATERIALS 0040-20006 - ARM WELDMENT SOURCE STD 8464 AMAT
  • APPLIED MATERIALS 0110-90770 - Index Control PCB AMAT
  • APPLIED MATERIALS 8330 - Pair Of Side viewport Panels AMAT
  • APPLIED MATERIALS 0040-81155 - LINER LOWER AMAT
  • APPLIED MATERIALS 0100-90618 - PCB H1 GROUND PDU MOTHER BOARD 0100-90036 AMAT
  • APPLIED MATERIALS 0040-47677 - FACEPLATE SIN XG DXZ DCVD AMAT
  • APPLIED MATERIALS 0020-31658 - CLAMP VESPEL OX-MLR-NIT 200MM AMAT
  • CTI-CRYOGENICS 0190-54040 - ON-BOARD IS CONTROLLER 34633 AMAT
  • APPLIED MATERIALS 0020-21665 - SHIELD AL/TI 8 INCH WAFER AMAT
  • APPLIED MATERIALS 0090-10397 - RF FILTER BOX AMAT