ETEL Linear Motors Product Manual

ETEL Linear Motors Product Manual

Enterprise background: ETEL brand core advantages

Focused on direct drive technology for over 50 years

Established in 1974, it is the world's only long-term manufacturer specializing in direct drive (linear/torque motor) technology, with all motors manufactured locally in Switzerland. It has a large number of patented electromagnetic, noise reduction, and low cogging force designs, leading the industry in density and motor efficiency.

Full stack solution capability

Not only the motor, but also the self-developed ACCURET/ULTRAMET motion controller, which can provide a complete set of direct drive solutions including motor, driver, encoder, and mechanical structure; Simultaneously compatible with mainstream third-party servo/CNC systems such as Siemens, Heidenhain, Fanuc, and Beifu.

Global Localization Service Network

Headquartered in M ô tiers, Switzerland, with subsidiaries/sales offices established in multiple countries including the Americas, Central Asia, Japan, South Korea, Singapore, and Europe, covering the global precision equipment market; We can provide full cycle technical support from equipment pre design, selection simulation to whole machine debugging.

Basic Principles of Linear Motors and Definition of Direct Drive Core

1. Essence of linear motor

Belonging to brushless synchronous servo motor, it can be understood as a rotating torque motor "spreading out flat":

Motive (Primary): Coil component, also known as slider/slide table;

Stator (secondary): permanent magnet track (magnetic strip);

By relying on electromagnetic coupling between coils and permanent magnets, electrical energy can be directly converted into linear mechanical energy without the need for a rotating linear conversion mechanism.

2. Core logic of Direct Drive

The load is rigidly connected to the motor rotor, completely eliminating intermediate mechanical transmission components such as ball screws, synchronous belts, gear racks, worm gears, etc

Core benefits

No backlash, no mechanical wear: the moving stator has no physical contact, the MTBF life is extremely long, and almost maintenance free;

High stiffness, high system bandwidth: significantly improved positioning repeatability and trajectory accuracy, with no upper limit on travel;

Compact structure and simplified whole machine: reduce transmission parts, shrink equipment volume, and lower the overall cost of ownership of the whole machine;

Dynamic performance fully loaded: high acceleration and deceleration, high speed, and minimal speed fluctuations.

3. Selection criteria differ from traditional rotating motors

Traditional motors are selected based on power; Linear motors can still output strong force at low speeds/stationary, and all selections are based on the core indicators of sustained force Fc and peak force Fp.

Two mainstream linear motors: Ironcore with iron core and Ironless without iron core

ETEL standardized products are divided into two categories, adapted to completely different working conditions, with clear distinctions in core structure and performance differences:

（1） Ironcore linear motor

Magnetic core laminations converge magnetic flux, with industry-leading thrust density per unit volume, supporting long-term high duty cycle continuous operation.

General Parameters

The maximum speed is 15m/s, the maximum acceleration is 20g, and the peak thrust is up to 3650N. The patented design achieves extremely low cogging thrust fluctuations; All compatible with the same series of MWD standard magnetic tracks, supporting 600VDC high voltage.

Three major product series

Model Core Features Applicable Scenarios

LMA has the highest sustained thrust, high thermal efficiency, and resistance to thermal drift in wafer inspection, chip mounting, PCB drilling, panel equipment, and medical automation

LMG compact, cost-effective, high peak sustained power ratio high-speed flying needle testing, light load high dynamic precision platform

LMS and LMG mechanical interfaces are fully compatible (only 7mm thick), with a continuous thrust increase of 30%, and can be directly plugged and upgraded to high duty cycle long-term continuous processing equipment

（2） Ironless linear motor (ILF+/ILM+)

The rotor has no silicon steel laminations, only coil components, no permanent magnetic attraction, zero tooth slot thrust fluctuation, and extremely light weight.

General Parameters

The maximum acceleration is 30g, and the peak thrust is up to 3200N; optional forced air cooling, with speed stability better than 0.1%, suitable for air bearing platforms.

Two major product series

Model Core Features Applicable Scenarios

ILF+small and medium thrust, lightweight rotor high-speed wafer inspection, wire bonding, ultra-high dynamic short stroke axis

ILM+Ironless High Thrust Version, Low Dynamic Mass Coordinate Measuring Machine CMM, Air Float Platform, Optical Processing, PCB Inspection, Medical Equipment

Addendum: Customized short stroke actuators

For extremely small stroke scenarios such as IC testing, picking and placing, and active vibration reduction, single-phase iron core and voice coil type miniature linear actuators can be customized, with a maximum acceleration of 30g, micrometer level positioning, integrated guide rails and gratings, and maintenance free for billions of cycles.

Core supporting components of the complete direct drive system

A high-performance linear motor platform is indispensable, and the document specifies the requirements for four key supporting components:

1. Motion controller (ACCURET/ULTRAMET)

ETEL's self-developed controller is the optimal matching solution:

High bandwidth control loop: high-frequency operation of current loop, speed loop, and position loop, with position loop bandwidth>100Hz and current loop>2kHz;

Built in advanced algorithms: feedforward PID, notch filtering, tooth slot force compensation, stick slip suppression;

Multi axis interpolation, real-time high-speed bus, setting time close to zero, nanometer level positioning stability;

Simultaneously compatible with mainstream third-party control systems such as Heidenhain, Siemens, Fanuc, Bosch, and Beifu.

2. Grating encoder

Direct drive has extremely high requirements for position feedback signals. The document recommends using an optical scanning grating ruler (Heidenhain):

No transmission clearance, stable low-speed and constant speed control, reducing motor heating, vibration, and surface defects during machining;

Selection reference: Each pole has 100 engraved lines, and ultra-high precision scenes require an increase in engraved line density; Interpolation with a controller can achieve sub second resolution.

3. Stiffness of guide rail and mechanical platform

The recommended natural frequency for mechanical structures is ≥ 200Hz, which requires finite element simulation verification;

The stiffness of the closed-loop system directly determines the positioning accuracy and vibration suppression ability, and the design of the platform, guide rail, and installation surface is the basis for maximizing the performance of the motor.

4. Active damping system QUIET (high-end optional)

6-degree-of-freedom active vibration isolation module, built-in short stroke linear motor, micrometer stroke to counteract ground/platform vibration, 1Gb high-speed real-time bus control, acceleration feedforward accuracy of over 99%, greatly reducing setting time, suitable for wafer inspection and nanoscale measurement equipment.

Key considerations for the entire process of motor selection

1. Basic force calculation (first step)

Peak force Fp: calculated jointly by load mass, maximum acceleration, friction force, and external cutting force;

Continuous power Fc: determined by the average heating power within the complete working cycle, directly related to the temperature rise of the motor;

Blocked rotor verification: Under static load, the single-phase coil generates uneven heat, and a locked rotor temperature rise verification must be performed;

Tooth slot force compensation: The ETEL controller has a built-in algorithm to counteract thrust fluctuations and ensure low-speed stability.

2. Electromagnetic and electrical matching

Winding specifications: Different windings correspond to different force velocity curves, and the driver bus voltage (300VDC/600VDC) and rated current need to be matched;

Motor constant Km: a core indicator for measuring the efficiency of motor force output (better than the force constant Kt); ETEL's patented slot full rate design reduces copper loss, improves sustained thrust and heat dissipation performance.

3. Thermal management (must be evaluated in the early stage of design)

The thrust of the motor is essentially limited by its heat dissipation capacity:

Sample labeling standard installation heat exchange area, if the contact surface of the equipment installation has better thermal conductivity, the sustainable thrust can be improved;

Adding a thermal insulation layer between the motor and the sliding table will severely limit the continuous output;

High duty cycle and high-precision equipment require reserved heat dissipation/air cooling solutions.

4. Selection of auxiliary tools

ETEL provides professional motor simulation selection software, which simulates the overall motion cycle of the machine and outputs the optimal performance/cost ratio solution; At the same time, detailed parameters can be obtained by consulting independent sample data tables and official integration manuals for each model.

Core application industries and implementation cases

ETEL linear motors specialize in high-end equipment for semiconductors, precision testing, and optical medical applications. The document lists mature landing scenarios:

Semiconductor Manufacturing (Core Track)

Wafer inspection platform: XYZ3TH nano motion platform, 2.5g acceleration, 1.5m/s speed, tool tip jitter<5nm;

Wire Bonder: Iron core free motor lightweight achieves ultra-high dynamic performance, with iron core lifting stroke coverage area;

IC testing, flip chip die bonding, PCB drilling/inspection, flying needle testing machine: LMG motor supports 24 axis synchronous control, motion resolution<20nm, double-sided high-speed testing;

CHARON2 XYT platform: 2kg load with 1g acceleration, positioning repeatability<1 μ m, chip probe micro force control.

Precision measuring equipment

CMM: LMS/LMG direct drive solution for coordinate measuring machines, with no worn parts, maintaining sub micron accuracy for years and improving detection throughput.

Optics and Display Industry

Panel FPD production, AOI automatic optical inspection: high thrust density reduces equipment volume, detection accuracy reaches below 15 μ m, long-term maintenance free.

Medical, laser cutting, photovoltaics, lithography machines, optical processing equipment

Ironless motors are compatible with air floating optical platforms, while iron cores are compatible with heavy-duty laser and stamping equipment.

Summary of General Comprehensive Advantages of Linear Motors

Ultra high dynamic performance: maximum acceleration of 30g, maximum speed of 15m/s;

Ultimate precision and stability: no backlash, zero transmission error, nanometer level repetitive positioning, extremely low speed fluctuation;

Minimalist mechanical design: eliminating vulnerable parts such as screws and belts, resulting in a compact equipment structure;

Ultra long lifespan, extremely low maintenance: no contact wear, excellent MTBF, significantly reducing equipment operation and maintenance costs;

Wide thrust velocity range: stable thrust output at rest, low speed, and high speed;

Flexible adaptation: The two product lines of no iron core and iron core cover the full operating conditions of light load high-speed and heavy load continuous operation; Standardized magnetic track, compatible with third-party control systems, low integration difficulty.