+086-15305925923

K-WANG

Service expert in industrial control field！
English 简体中文
Product
Article
NameDescriptionContent
Adequate Inventory, Timely Service
pursuit of excellence 
Ship control system
Equipment control system
Power monitoring system
Current position:
Home >> ZYGO >> Zygo's ZMI 2000 displacement measurement interferometer system
新闻动态
newS
   
Brand

Zygo's ZMI 2000 displacement measurement interferometer system

From: | Author:Wang | Time :2025-10-28 | 329 visit: | Share:

Zygo’s ZMI 2000 System Displacement Measuring Interferometer Systems

Displacement Measuring Interferometry improves positioning accuracy.  Zygo’s ZMI 2000 is the industry’s top performing Displacement Measuring Interferometer (DMI) System offering the highest resolution, the highest velocity, and lowest data age uncertainty for real time position control.  Zygo, a world-class interfero metric metrology company, supports you at all levels of design, engineering and manufacturing.  Zygo works as an extension of your research, engineering and  manufacturing teams in providing metrology solutions.

Performance Benefits of the ZMI 2000

• Positioning accuracy – Velocity and time dependent errors are eliminated.  All axes of motion are synchronized to an uncertainty of ≤1.7 ns.
•Overlay accuracy – λ/2048 resolution(0.31 nm) with 2 pass interferometers for excellent overlay and alignment capability.
• System throughput – Slew rates of 2.1 m/s with 2 pass interferometers enabled by the 20 MHz heterodyne split frequency.ZMI 2000 Systems are found in the most demanding feedback control applications:
• Lithography tools: optical steppers and scanners,e-beam and laser mask writers.
•Mask, wafer and LCD inspection and measurement tools, CD-SEM’s.
• Process equipment, memory repair tools.Integration Benefits of the ZMI 2000 for real-time position control

•Reduce heat, cost and ESD sensitivity, improved electrical isolation, and minimal package size 

Fiber optic cables are used on both the reference and measurement legs.

•Reduce cost in backplane space requirements
The ZMI 2002 offers two axes of interferometry on a single 6U VME board.
•Reduced design costs with simplified integration time – The measurement boards are fully programmable through the interface bus (VME or ISA), or the P2 interface.

•Reduced cost of integration – Standard hardware interfaces for up to 7.7 MHz P2 data rates for up to 16 axes.  Easily expanded to accommodate more axes at the same rates.

The ZMI 2000 as a Metrology System Unparalleled performance and flexibility.  All of the performance benefits of the ZMI 2000 with the following integration options:

• ZMI Systems Chassis with PCI-VME for processor speed real-time data,
• ZMI Systems Chassis with serial or GPIB interface for more cost effective solutions,
• ZMI PC for integration into an ISA slot.ZMI 2000 Systems are in use in Standards Labs worldwide for applications in measurement and calibration of high resolution and high frequency mechanical motions:
• Piezo transducer calibration,
• Linear Scale calibration,
• Rotary Scale calibration,
• AFM stage calibration.

The ZMI 2000 System Laser Head

The laser source may be the single most critical component of the Displacement Measuring Interferometer.  

To control and assure laser head quality, Zygo manufactures our own laser tubes.

The proprietary tube design, combined with a state-of-the-art assembly and test facility, provides for a highly reliable laser head with:
• > 50,000 hour lifetime,
• Longest basic warranty at 18 months,
• Extended warranties of up to 5 years,
• Up to 8 axes of interferometry on a single head,
• Multiple head synchronization.


ZMI 2000 System Integration Features

• Optical power monitor for the laser head output,and measurement board input.
• Built in laser head diagnostics.
• Position, time, and velocity, all available independently on the P2, or VMEbus.
• Programmable synchronization signal.
• Measurement boards can be used in any standard 6U VME or ISA backplane.
The ZMI 2000 System technology combined with our world-class opto-mechanical design and manufacturing center in Middlefield, CT makes Zygo Corporation a key partner in the successful design, manufacture, and integration of your real-time position control systems.


ZMI 2000 System Performance

4 Pass PMI*、 2 Pass PMI、1 Pass LI**
Position Resolution： λ/4096 (0.15 nm)、 λ/2048 (0.31 nm)、 λ/1024 (0.62 nm)
Position Range： ± 5.3 m、 ±10.6 m、± 21.2 m
Velocity Limit： 1.05 m/s、 2.1 m/s、 4.2 m/s
Maximum Acceleration：980 m/s2, (100 g)
Data Age: 335 ns
Data Age Uncertainty
Two Axes: Uncompensated, ±15 ns (ZMI 2001) / ±12 ns (ZMI 2002) / ± 16 ns (ZMI PC)
Compensated, ±1.2 ns (ZMI 2001, ZMI 2002)
Compensated, ±1.5 ns (ZMI PC)
Three Axes: Uncompensated, ±19 ns (ZMI PC)
Compensated, ±1.7 ns (ZMI PC)
Eight Axes: Uncompensated, ±36 ns (ZMI 2001) / 22 ns (ZMI 2002)
Compensated, ±1.4 ns (ZMI 2001, ZMI 2002)
ZMI 2000 System Laser Head
Type:HeNe, cw, two frequency
Power Minimum / Typical： 425 µW / 600 µW Will support up to 8 axes
Lifetime: >50,000 hrs, 18 month warranty
Frequency split:20 MHz ± 1600 Hz
Vacuum Wavelength Accuracy:±0.1 ppm (lifetime)
Vacuum Wavelength Stability: ±0.01 ppm (24 hrs)
Reference Signal: Fiber Optic



ZMI 2000 System Measurement Boards

# of Axes per Board: 1 (ZMI 2001, ZMI PC) / 2 (ZMI 2002)
Power Requirement:+5V ± 5% @ 3.5A (ZMI 2001, ZMI 2002, ZMI PC)+12V ± 10% @ 0.1A (ZMI PC)
Position Format: 36 bit - 2’s complement
Velocity Format: 32 bit - 2’s complement
Time Range: 107.4 seconds
Time Format:32 bit - 2’s complement
Time Resolution: 25 ns
Fiber Optic Signals: Reference and Measurement
Error Status: Reference (signal, PLL, DLL)
Measure (Missing, Dropout, Glitch)
Velocity (Board, User Defined)
Acceleration
Overflow (32 bit, 36 bit)
System Synchronization: Clock in or Clock out
ZMI VME Compliance: VMEBus specification revision C.1
6U size
A16 or A24 addressing
D16 or D32 data transfer
D08 (0) interrupt acknowledge cycle
ZMI PC Compliance：UL94V0
Full length ISA card
16 bit ISA bus
32 bit P2 bus



  • ABB NPCT-01C Process Control Terminal – Industrial Automation Interface
  • ABB 216DB61 AC Motor Protection Relay – Reliable Motor Safety and Control
  • ABB 216AB61 AC Motor Protection Relay – Industrial Motor Safety
  • ABB 5SHX1060H0003 High Voltage Circuit Breaker – Reliable Industrial Protection
  • ABB 3BHB003154R0101 AC Drive Module – Industrial Automation Solutions
  • ABB UAD149A0011 Industrial Excitation Control Module for Advanced Drive Systems
  • ABB UAD149 Excitation Control Unit
  • ABB PFEA113-20 Tension Measurement Module
  • ABB GDD471A001 Drive Control Board
  • ABB UCD224A103 Control Unit Module
  • ABB PDD205A1121 Power Drive Control Module
  • ABB DSPC454 Processor Module
  • ABB 81EU01E-E Excitation Control Module
  • ABB TK457V050 Control Cable Assembly
  • ABB DSRF197K01 I/O Interface Module
  • ABB TK802F Communication Cable Assembly
  • ABB 3BHE039203R0101 Control Interface Module
  • ABB 3BHB004027R0101 Power Control Board
  • ABB 3BHB003154R0101 Power Control Board
  • ABB PM864AK01-eA AC 800M Processor Unit
  • ABB CI868K01-eA Communication Interface Module
  • ABB 5SHY35L4520 IGCT Power Semiconductor Module
  • ABB UNS0119A-P V101 Control Interface Module
  • ABB GCC960C103 Control Communication Board
  • ABB GVC736CE101 Voltage Control Module
  • ABB PCD244A101 Control Processor Module
  • ABB GFD212A Ground Fault Detection Module
  • ABB PPD513 A2A‑11165 Industrial Automation Controller
  • ABB PDD200A101 Digital Processing Device
  • ABB SPIET800 Industrial Automation Interface Module
  • ABB SPAD346C3 Protection and Automation Device
  • ABB FPX86-9329--C Power Interface Board
  • ABB ARCOL0339 Precision Power Resistor
  • ABB 5SDF0860H0003 Phase Control Thyristor Module
  • ABB KUC720AE01 Drive Control Module
  • ABB UFC718AE01 Control Interface Unit
  • ABB 5SHX2645L0004 IGCT Power Semiconductor Module
  • ABB SPHSS03 High-Speed Signal Processing Module
  • ABB CB801 Communication Backbone Module
  • ABB DSAI130D Analog Input Module
  • ABB 086345-504 Industrial Interface Control Module
  • ABB PFCL201C 10KN Tension Measurement Module
  • ABB 3HAC17484-8108 Industrial Control Module
  • ABB 5SHY3545L0009 IGCT Power Semiconductor Module
  • ABB NPCT-01C Control Processing Module
  • ABB 216AB61 Industrial Control Module for Automation Systems
  • ABB 5SHX1060H0003 High Power Thyristor Module for Industrial Power Control
  • ABB 07KT97H3 PLC Central Processing Unit for Industrial Automation
  • ABB 3BHB005171R0101 Power Semiconductor Module for Industrial Power Systems
  • KEBA E-SP-CCEC/A/22 - Keyboard Panel
  • KEBA ERHL33 - Module
  • KEBA K-FTC-AN/B - Control Panel Board
  • KEBA DO321 1914D-0 - Digital Output Module
  • KEBA T70Q - Teach Pendant
  • KEBA BL272/A / BL272/B - Bus Coupling Module
  • KEBA T70R - Teach Pendant
  • KEBA PRONET-E-20A-K - Servo Drive
  • KEBA T55-RA0-AU0-LK - Mobile HMI KeTop
  • KEBA DO-272/A - Digital Output Module
  • KEBA PS240/A - Power Supply Module
  • KEBA 2134-00393 - Module Code
  • KEBA E-10-ANALOG-SU - Analog Card
  • KEBA 1904D-0 / D1458E - E-10 Analog Card
  • KEBA FM265A - Function Module
  • KEBA CR17910086 - Controller Board
  • KEBA C5G-TP5WC2 - Robot Teach Pendant
  • KEBA PD242A - Power Supply Module
  • KEBA DI-325 - Digital Input Card
  • KEBA C2-TM-240/A - Digital Input Module
  • KEBA D1547C - I/O Bus Coupling Board
  • KEBA CR-092 - Interface Module
  • KEBA 3HAC023195-003 - IRC5 Teach Pendant Cable
  • KEBA KETOP-T150-MA0 - Mobile HMI
  • KEBA KC-P30-EC24011 - Control Module
  • KEBA 1770B-1 - E-8-THERMO Card
  • KEBA T20T-T00-AR0-CE6 - KeTop Terminal
  • KEBA D1633C-1 - CPU Card
  • KEBA HT401-232-8/0 - Teach Pendant
  • KEBA AO-570 - Analog Output Module
  • KEBA T10-mAb-DMV - Handheld Terminal
  • KEBA C70-rqa-AK0-Le - KeTop Teach Pendant
  • KEBA 1918F-0 - Digital Output Board
  • KEBA T10-mAa-DMV - Handheld Terminal
  • KEBA HT2-SCHLUSSELS - Key Switch for HT2
  • KEBA T100-003-CES - HMI Terminal
  • KEBA GVME610IO - I/O Module
  • KEBA HT501-231 - Teach Pendant
  • KEBA E-CG-CONTROL - Graphic Control Card
  • KEBA D1420F - F-SIC-1 Circuit Board
  • KEBA E-ANA-SUB2 - Analog Sub-module
  • KEBA HT401-222-4 - Teach Pendant
  • KEBA II030 - Input Module
  • KEBA T155-M10-AN0-W - KeTop Mobile HMI
  • KEBA CP088-B - Processor Module
  • KEBA HT40123280 - Operating Terminal
  • KEBA HT4222 - Handheld Terminal
  • KEBA H24025369 - Replacement Part
  • KEBA H24024891 - Replacement Part
  • KEBA SR161 - Analog Input Card
  • KEBA 1762A - E-CRT/EL Circuit Board
  • KEBA T50-011-CES-CE5 - Operator Terminal
  • KEBA E-CON-ELD/B/15 - Control Panel
  • KEBA E-8-THERMO - Thermocouple Card
  • KEBA 330/A-1211-20 - Axis Module
  • KEBA T55-maw-AU0-CE6 - Mobile HMI
  • KEBA C150-110-AK0-N - KeTop HMI
  • KEBA HT4-20656 / HT4-221 - Handheld Terminal
  • KEBA 18658-1 - Analog Board
  • KEBA LM64P89 - LCD Display Screen
  • KEBA E-CPU-88-A - CPU Board
  • KEBA D-CE/59718/15 - Control Board
  • KEBA KC-P30-ES2400E2-E00 - Control Module
  • KEBA 3HAC12929-1 - Teach Pendant SX TPU
  • KEBA E-CON-CC100/A - Control Panel Engel
  • KEBA T200-M01-P20-WES7 - Panel PC Windows Embedded
  • KEBA KC-P30-ES2400B2-M0R - KeControl C3 Module
  • KEBA E8ANALOGC - Analog Card
  • KEBA E-CPU-88-B - CPU Board
  • KEBA T55-raw-AU0-CE6 - Mobile HMI
  • KEBA D1633C - CPU Board
  • KEBA T55-MAW-Au0-CE6 - Mobile HMI
  • KEBA 3HAC11266-4 - Teach Pendant Cable
  • KEBA T20e-m00-Br0-C - Handheld Terminal
  • KEBA E-3-ACU-INC - Controller Board
  • KEBA E-PS-24V - Power Supply Module 24V
  • KEBA C55-2aw-1U0-R - Control Unit
  • KEBA T70-qqu-Aa0-LK - KeTop Teach Pendant
  • KEBA PS244 - Power Supply Module