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ZYGO ZMI 2000 System Displacement Measuring Interferometer Systems

From: | Author:Wang | Time :2025-08-01 | 429 visit: | Share:
ZYGO ZMI 2000 System Displacement Measuring  Interferometer Systems

Displacement Measuring Interferometry improves positioning accuracy.  Zygo’s ZMI 2000 is the industry’s top performing Displacement Measuring Interferometer (DMI) System offering the highest resolution, the highest velocity, and lowest data age uncertainty for real time position control.  Zygo, a world-class interfero metric metrology company, supports you at all levels of design, engineering and manufacturing.  Zygo works as an extension of your research, engineering and  manufacturing teams in providing metrology solutions.

Performance Benefits of the ZMI 2000

• Positioning accuracy – Velocity and time dependent errors are eliminated.  All axes of motion are synchronized to an uncertainty of ≤1.7 ns.
•Overlay accuracy – λ/2048 resolution(0.31 nm) with 2 pass interferometers for excellent overlay and alignment capability.
• System throughput – Slew rates of 2.1 m/s with 2 pass interferometers enabled by the 20
MHz heterodyne split frequency
ZMI 2000 Systems are found in the most demanding feedback control applications:
• Lithography tools: optical steppers and scanners,e-beam and laser mask writers.
•Mask, wafer and LCD inspection and measurement tools, CD-SEM’s.
• Process equipment, memory repair tools.

Integration Benefits of the ZMI 2000 for real-time position control

•Reduce heat, cost and ESD sensitivity, improved electrical isolation, and minimal package size
Fiber optic cables are used on both the reference and measurement legs.
•Reduce cost in backplane space requirements
The ZMI 2002 offers two axes of interferometry on a single 6U VME board.
•Reduced design costs with simplified integration time – The measurement boards are fully programmable through the interface bus (VME or ISA), or the P2 interface.
•Reduced cost of integration – Standard hardware interfaces for up to 7.7 MHz P2 data rates for up to 16 axes.  Easily expanded to accommodate more axes at the same rates.
The ZMI 2000 as a Metrology System Unparalleled performance and flexibility.  All of the performance benefits of the ZMI 2000 with the following integration options:
• ZMI Systems Chassis with PCI-VME for processor speed real-time data,
• ZMI Systems Chassis with serial or GPIB interface for more cost effective solutions,
• ZMI PC for integration into an ISA slot.
ZMI 2000 Systems are in use in Standards Labs worldwide for applications in measurement and calibration of high resolution and high frequency mechanical motions:
• Piezo transducer calibration,
• Linear Scale calibration,
• Rotary Scale calibration,
• AFM stage calibration.

The ZMI 2000 System Laser Head

The laser source may be the single most critical component of the Displacement Measuring Interferometer.  To control and assure laser head quality, Zygo manufactures our own laser tubes.
The proprietary tube design, combined with a state-of-the-art assembly and test facility, provides for a highly reliable laser head with:
• > 50,000 hour lifetime,
• Longest basic warranty at 18 months,
• Extended warranties of up to 5 years,
• Up to 8 axes of interferometry on a single head,
• Multiple head synchronization.


ZMI 2000 System Integration Features

• Optical power monitor for the laser head output,
and measurement board input.
• Built in laser head diagnostics.
• Position, time, and velocity, all available independently on the P2, or VMEbus.
• Programmable synchronization signal.
• Measurement boards can be used in any standard 6U VME or ISA backplane.
The ZMI 2000 System technology combined with our world-class opto-mechanical design and manufacturing center in Middlefield, CT makes Zygo Corporation a key partner in the successful design, manufacture, and integration of your real-time position control systems.


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